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Fume Cabinet for CP3000

Category: Chemical Polishing & Chemical Mechanical Polishing

Description

This fume extraction cabinet (1CP3AC-0100) is recommended for the handling and filtration of toxic gases, vapours, particles and odours, and is ideal for use with a Logitech CP3000 Chemical Polishing Machine.

The chemicals used in fine prime face polishing of semiconductor wafers and other electronic and opto-electronic crystals, such as Bromine Methanol, Peroxide Alkaline or acid etches, are highly aggressive. They require the use of corrosion-resistant equipment which is specifically designed for the purpose, but in addition the appropriate measures must be taken to ensure that the operator does not come into contact with the toxic vapours.

It ensures the protection of the respiratory passages and the quality of the working environment of laboratory personnel who regularly work with toxic compounds such as Bromine Methanol.

The unit’s filtration system is specially designed to remove toxic substances and is of extremely high efficiency. Throughout the lifetime of the filter, the air discharged into the room is totally free of any toxic concentration – unlike conventional units which merely dilute the toxic substances, releasing a reduced concentration into the room.

The fume cabinet is constructed of steel protected with an anti-acid polyethylene coating. The transparent elements are made of acrylic panels. If required, the unit can be supplied with an optional junction frame to enable it to be interconnected to another cabinet.

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Key Features

Ductless: can be installed instantly
High efficiency filtration
Environmentally safe: exhausts no pollutants
Mobile
Modular design allows units to be interconnected

Technical Specification:

Temperature Range: 15°C to 32°C Humidity: Max RH 80% for temperatures up to 31°C
Filter Type: OS 4 Pre-Filter 1: Organic Vapours Secondary acids Enviro Carbon Filter (OS) Main Filter 2: Acid Vapours Secondary Organic acids Enviro Carbon Filter (H+)
Volume of air: 130m3/hr Face Velocity: >0.5m/s Fan type: EBM R2E-190-AO26-05 230V 50Hz-dynamically balanced centrifugal Opening type: Teardrop
Power Consumption: 45 Watts Supple Amps: 5.0 Voltage: 230V ± 10% 50 Hz Airflow alarm: AMS Programmable electronic with audible as an option
Lighting: Integrated lighting up to 19W, Available as an option Sound Level: < 50dBA at 1 metre Net Weight: 75Kg

Semiconductors

Semiconductor materials are used in a wide variety of devices such as field effect transistors (MosFets, Fets), integrated circuits (ICs, MMICs, ASICs), focal plane arrays and infra-red detectors.

Whatever the application or material, each semiconductor wafer undergoes several common stages during manufacture, which include slicing the wafer from the crystal, preparing the surface prior to fabrication and thinning the device after fabrication through the use of lapping and polishing techniques.

Logitech provide complete system solutions including consumables for the precise thinning of these III-V, I.R. and similar materials.

Optics

The importance of optical polishing and the processing of optical components has never been greater with the ongoing development of the telecommunications market. Whether for Infra Red and polymer waveguide production or fibre optic cable polishing.

The precision design and manufacture of our equipment enable you to obtain maximum results from the cutting, lapping and polishing of these optical materials.

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