The University of California’s (UCSB) Nanofabrication facility provides an outsourced research service for both academia and industry in areas such as lithography, thin-film deposition and device fabrication.
The Nanofabrication facility is part of the National Nanotechnology Infrastructure Network, a partnership of fourteen user facilities with a focus on high-precision processing.
Logitech were approached by UCSB to provide a polishing system that can achieve high precision, mid-volume outputs for chemical mechanical polishing processes. Logitech were delighted to support this well known and respected facility and identified an Orbis CMP system as the ultimate solution, meeting the needs of both UCSB and their substantial research community.
The Logitech Orbis CMP system has been successfully installed into the nanofabrication centre and has proved to be a key solution for the facility and its users. Especially for the processing of Gallium Arsenide, Silicon Carbide and Silicon.
Jock Bovington at UCSB commented “I’m really happy with the new Logitech CMP. The software is very intuitive and fast. I have been able to develop a new full wafer process quickly and with much greater uniformity than I had with other tools. The surface roughness is also as low as I’ve seen and has enabled our bonding technology to yield novel devices.”
As world leaders in material processing technologies, Logitech are committed to working with and supporting on-going research projects and organisations.