The Logitech Orbis CMP system is a precision engineered, floor standing CMP tool ideally suited for R&D environments. Typically the Orbis CMP System is used in applications which conduct pilot production tests with optimum analytical capabilities and enhanced processing performance.
The system capabilities can be adapted to include:
Back-end IC manufacturing,
Micro-Electromechanical Systems (MEMS) fabrication,
Low cost solution – high value results
The ability to conduct pilot process tests normally requires expensive production level systems, yet the Orbis achieves this capability in a cost effective system. Incorporating enhanced features and high-tech functionality, the Orbis CMP System achieves superior processing capabilities to those usually offered in a system of this size.
Flexible use of operation
In addition to its ability to replicate production level environments, the Orbis is also suitable for more traditional R&D usage. This includes small batch production and pilot production testing. The system is capable of processing all die, wafer and part wafers up to 200mm (8″) diameter using a dedicated carrier. As with previous Logitech CMP equipment, templates and shims can be utilised or the samples can be mounted directly to the sample carriers.
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- Ideal for R&D environments and pilot process testing
- High capacity workspace for samples up to 2 of 200mm (8″)
- Downloadable data for analysis of process parameters
- Laboratory scale footprint
- Industry standard pad conditioning to maintain optimum pad life