Description
The Logitech Wafer Substrate Bonding Units (WSBU’s) offer premium bonding for the processing of fragile semiconductor materials such as indium phosphide and gallium arsenide. The bonding units are designed to minimise breakage with these expensive materials, whilst retaining the highest quality of sample yield.
The WSBU’s are designed to meet the stringent requirements of todays wafer processes. Available as a single, three station, or floor standing model, this highly automated bonder incorporates both vacuum and pressure bonding facilities.
Available as a single or three station benchtop unit with a wafer process capacity of 4”/100mm or 6”/150mm – bond three part or whole wafers consistently with a high standard of support carrier parallelism.
The WSB300 floor standing model allows operators to bond materials and wafers up to 300mm/12” (or smaller multiple samples using a template) in diameter to the exacting standards achieved by the benchtop WSBU’s
– this makes the WSB300 ideal for high throughput bonding requirements.
Our latest environmentally conscious upgrade: the 12” bonder now features an updated cooling system, replacing the oil-based heat exchangers.
Dry pump option now available upon request, completely eliminating reliance on oil-based products. This means not only enhanced performance but also a significant reduction in our environmental footprint.
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Key Features
- 100mm (4″), 150mm (6″) or 300mm (12″) wafer capacity
- Single or multiple wafer bonding
- Process repeatability
- Automated process cycle
- Excellent wafer to support disc parallelism
- Now with updated software to further meet your process demands.