- Vacuum chuck sample location
- Variable additional load of up to 8kg
- Suitable for thin section polishing
- Suitable for wafer planarization
Vacuum Chuck Mounting Blocks provide an ideal means of holding specimens for polishing operations, where no thickness control or angular adjustment is required.
The VCB2 and VCB7 are precisely engineered vacuum chucking facilities. A choice of chuck face patterns enable slide mounted samples or wafer material to be held securely by vacuum.
To obtain control of polishing speed across different material types and with different polishing media, nine 0.35kg loading weights are supplied with the jig (0.47kg for VCB7). An additional 3.5kg weight can be used if required.
The VCB2 is available with a number of different chuck face patterns and accomodates samples of up to 100mm in diameter. 100 x 75mm or more smaller samples.
The VCB7 is a larger version which can hold large format geological thin sections (150x100mm), or a large number of smaller slides for polishing. It will also accommodate 150mm diameter semiconductor wafers.
The sample is held on the chuck face by a vacuum, which permits ease and speed of mounting and demounting the sample. The vacuum is fed to the chuckface by means of a vacuum tube in the middle of the jig. A rotary vacuum adaptor sits on top of this tube ensuring that the jig is always free to turn, providing a smooth polishing action.
Vacuum Chuck Mounting Blocks are excellent for polishing thin sections, including soils, coals, palaentological specimens, rocks, concretes, and cements.
They are also ideal for wafer planarization in which a small amount of material is polished from partially or fully fabricated wafers to remove surface irregularity.
|28 x 48mm||6||14|
|30 x 45mm||6||9|
|25 x 75mm||4||10|
|45 x 60mm||3||5|
|50 x 75mm||2||4|
|60 x 90mm||1||2|
|75 x 110mm||1||–|
|100 x 150mm||–||1|